Inventor
KANG SONG YUN
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KANG SONG YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10403814B2Sep 3, 2019
Method of cleaning and method of plasma processing
TOKYO ELECTRON LTD2 citations71
US7763551B2Jul 27, 2010
RLSA CVD deposition control using halogen gas for hydrogen scavenging
TOKYO ELECTRON LTD2 citations62
US11832524B2Nov 28, 2023
Method for processing substrate, processing apparatus, and processing system
TOKYO ELECTRON LTD0 citations60
US10944051B2Mar 9, 2021
Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method
TOKYO ELECTRON LTD1 citations60
US7348129B2Mar 25, 2008
Electron beam processing method and apparatus
TOKYO ELECTRON LTD0 citations51
US11171286B2Nov 9, 2021
Method of processing workpiece
TOKYO ELECTRON LTD0 citations50
US11152564B2Oct 19, 2021
Substrate manufacturing method and processing system
TOKYO ELECTRON LTD0 citations50
US10790152B2Sep 29, 2020
Method for etching multilayer film
TOKYO ELECTRON LTD0 citations40
US9611545B2Apr 4, 2017
ZnO film production system and production method using ZnO film production system having heating units and control device
TOKYO ELECTRON LTD0 citations40
US10181559B2Jan 15, 2019
Etching method
TOKYO ELECTRON LTD0 citations39
US9947864B2Apr 17, 2018
Method for etching object to be processed
TOKYO ELECTRON LTD0 citations39