Inventor
SHIMODA KEIICHI
US7 patents
⚠️ This page may combine multiple inventors who share the name “SHIMODA KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS9647206B2May 9, 2017
Method for etching layer to be etched
TOKYO ELECTRON LTD14 citations83
US10053773B2Aug 21, 2018
Method of cleaning plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10403814B2Sep 3, 2019
Method of cleaning and method of plasma processing
TOKYO ELECTRON LTD2 citations71
US10975468B2Apr 13, 2021
Method of cleaning plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US10944051B2Mar 9, 2021
Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method
TOKYO ELECTRON LTD1 citations60
US9803286B2Oct 31, 2017
Method for etching copper layer
TOKYO ELECTRON LTD0 citations40