Inventor
ORTHEN ANDRÉ
DE2 patents
Patents
2 patentsUS10514608B2Dec 24, 2019
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH4 citations68
US11048172B2Jun 29, 2021
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH0 citations58