Inventor

WELKER JOACHIM

DE4 patents

⚠️ This page may combine multiple inventors who share the name “WELKER JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL AG

2 patents

US11175567B2Nov 16, 2021

Objective lens main body, objective lens, and objective lens system

ZEISS CARL AG2 citations68

US11210861B2Dec 28, 2021

Method for adjusting and visualizing parameters for focusing an objective lens on an object and system for implementing the method

ZEISS CARL AG0 citations43

ZEISS CARL SMT GMBH

2 patents

US10514608B2Dec 24, 2019

Method for producing an illumination system for an EUV projection exposure system, and illumination system

ZEISS CARL SMT GMBH4 citations68

US11048172B2Jun 29, 2021

Method for producing an illumination system for an EUV projection exposure system, and illumination system

ZEISS CARL SMT GMBH0 citations58