Inventor
WATERMAN AARON ARCHER
US6 patents
⚠️ This page may combine multiple inventors who share the name “WATERMAN AARON ARCHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10133265B2Nov 20, 2018
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations71
US9746849B2Aug 29, 2017
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD3 citations70
US9405289B2Aug 2, 2016
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations60
US10571900B2Feb 25, 2020
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD0 citations49