Inventor
ZHAO YINGBO
US6 patents
Patents
6 patentsUS12401169B2Aug 26, 2025
Laser light energy and dose control using repetition rate based gain estimators
Cymer LLC0 citations59
US12374853B2Jul 29, 2025
Control system for a plurality of deep ultraviolet optical oscillators
Cymer LLC0 citations59
US11081852B2Aug 3, 2021
Laser light energy and dose control using repetition rate based gain estimators
Cymer LLC0 citations59
US12401167B2Aug 26, 2025
Gas control method and related uses
Cymer LLC0 citations55
US12130558B2Oct 29, 2024
Radiation system for controlling bursts of pulses of radiation
Cymer LLC0 citations45
US11947268B2Apr 2, 2024
Energy correction module for an optical source apparatus
Cymer LLC0 citations38