Inventor
BUCKLEY W DEREK
US4 patents
Patents
4 patentsUS4472824ASep 18, 1984
Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
PERKIN ELMER CORP21 citations78
US4329410AMay 11, 1982
Production of X-ray lithograph masks
PERKIN ELMER CORP25 citations78
US4831640AMay 16, 1989
Illumination system for x-ray lithography
PERKIN ELMER CORP13 citations69
US4473777ASep 25, 1984
Electron emitter assembly
PERKIN ELMER CORP4 citations60