Inventor

TSUTSUMI YOSHITSUGU

JP3 patents

Patents

3 patents

US4668160AMay 26, 1987

Vacuum pump

HITACHI LTD38 citations90

US4889995ADec 26, 1989

Apparatus for analysis employing electron

HITACHI LTD16 citations72

US6706647B1Mar 16, 2004

Method of and apparatus for manufacturing semiconductors

HITACHI LTD12 citations71