Inventor

SEIRMARCO JAMES A

US3 patents

⚠️ This page may combine multiple inventors who share the name “SEIRMARCO JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US4135097AJan 16, 1979

Ion implantation apparatus for controlling the surface potential of a target surface

IBM36 citations90

US5166856ANov 24, 1992

Electrostatic chuck with diamond coating

IBM73 citations89

SONY CORP

1 patent

US5569363AOct 29, 1996

Inductively coupled plasma sputter chamber with conductive material sputtering capabilities

SONY CORP84 citations94