Inventor
DUDLEY IAN
US3 patents
Patents
3 patentsUS6441398B2Aug 27, 2002
Algorithm for detecting sloped contact holes using a critical-dimension waveform
ADVANCED MICRO DEVICES INC6 citations71
US6277661B1Aug 21, 2001
Method for detecting sloped contact holes using a critical-dimension waveform
ADVANCED MICRO DEVICES INC5 citations71
US6627887B1Sep 30, 2003
System and method for constructing a profile of a structure in an integrated circuit
ADVANCED MICRO DEVICES INC9 citations66