Inventor
PHAN KHOI
US14 patents
⚠️ This page may combine multiple inventors who share the name “PHAN KHOI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
13 patentsUS6570157B1May 27, 2003
Multi-pitch and line calibration for mask and wafer CD-SEM system
ADVANCED MICRO DEVICES INC69 citations96
US6513151B1Jan 28, 2003
Full flow focus exposure matrix analysis and electrical testing for new product mask evaluation
ADVANCED MICRO DEVICES INC100 citations96
US6453916B1Sep 24, 2002
Low angle solvent dispense nozzle design for front-side edge bead removal in photolithography resist process
ADVANCED MICRO DEVICES INC65 citations96
US7251033B1Jul 31, 2007
In-situ reticle contamination detection system at exposure wavelength
ADVANCED MICRO DEVICES INC30 citations92
US7224456B1May 29, 2007
In-situ defect monitor and control system for immersion medium in immersion lithography
ADVANCED MICRO DEVICES INC44 citations92
US7069155B1Jun 27, 2006
Real time analytical monitor for soft defects on reticle during reticle inspection
ADVANCED MICRO DEVICES INC25 citations92
US6573498B1Jun 3, 2003
Electric measurement of reference sample in a CD-SEM and method for calibration
ADVANCED MICRO DEVICES INC25 citations92
US6573497B1Jun 3, 2003
Calibration of CD-SEM by e-beam induced current measurement
ADVANCED MICRO DEVICES INC26 citations92
US6510730B1Jan 28, 2003
System and method for facilitating selection of optimized optical proximity correction
ADVANCED MICRO DEVICES INC39 citations92
US7173648B1Feb 6, 2007
System and method for visually monitoring a semiconductor processing system
ADVANCED MICRO DEVICES INC10 citations83
US6622547B1Sep 23, 2003
System and method for facilitating selection of optimized optical proximity correction
ADVANCED MICRO DEVICES INC12 citations74
US6441398B2Aug 27, 2002
Algorithm for detecting sloped contact holes using a critical-dimension waveform
ADVANCED MICRO DEVICES INC6 citations71
US6277661B1Aug 21, 2001
Method for detecting sloped contact holes using a critical-dimension waveform
ADVANCED MICRO DEVICES INC5 citations71