Inventor
THORNTON BRIAN S
US5 patents
⚠️ This page may combine multiple inventors who share the name “THORNTON BRIAN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS6261168B1Jul 17, 2001
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP89 citations96
US6585579B2Jul 1, 2003
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP61 citations94
US6634936B2Oct 21, 2003
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP7 citations72