Inventor
STEIGERWALD MICHAEL
DE17 patents
⚠️ This page may combine multiple inventors who share the name “STEIGERWALD MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL NTS GMBH
4 patentsUS6855938B2Feb 15, 2005
Objective lens for an electron microscopy system and electron microscopy system
ZEISS CARL NTS GMBH97 citations95
US7022987B2Apr 4, 2006
Particle-optical arrangements and particle-optical systems
ZEISS CARL NTS GMBH8 citations73
US6828565B2Dec 7, 2004
Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source
ZEISS CARL NTS GMBH7 citations72
US6949744B2Sep 27, 2005
Electron microscopy system, electron microscopy method and focusing system for charged particles
ZEISS CARL NTS GMBH5 citations61
KLA CORP
4 patentsUS12283453B2Apr 22, 2025
Creating multiple electron beams with a photocathode film
KLA CORP0 citations60
US12165831B2Dec 10, 2024
Method and system of image-forming multi-electron beams
KLA CORP1 citations60
US11749495B2Sep 5, 2023
Bandpass charged particle energy filtering detector for charged particle tools
KLA CORP0 citations50
US12068129B2Aug 20, 2024
Tilt-column multi-beam electron microscopy system and method
KLA CORP0 citations49