Inventor

SVIRCHEVSKI JULIA

US6 patents

⚠️ This page may combine multiple inventors who share the name “SVIRCHEVSKI JULIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7063455B2Jun 20, 2006

Chemical dilution system for semiconductor device processing system

APPLIED MATERIALS INC12 citations78

US7364349B2Apr 29, 2008

Chemical dilution system for semiconductor device processing system

APPLIED MATERIALS INC7 citations70

LAM RES CORP

2 patents

US6170110B1Jan 9, 2001

Apparatus for HF-HF cleaning

LAM RES CORP13 citations69

US6093254AJul 25, 2000

Method of HF-HF Cleaning

LAM RES CORP6 citations69

STEIN NATHAN D

1 patent

US8322045B2Dec 4, 2012

Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife

STEIN NATHAN D10 citations76

NOVELLUS SYSTEMS INC

1 patent

US7686935B2Mar 30, 2010

Pad-assisted electropolishing

NOVELLUS SYSTEMS INC4 citations62