Inventor

PIGUR BJOERN

US2 patents

Patents

2 patents

US7776166B2Aug 17, 2010

Texture and grain size controlled hollow cathode magnetron targets and method of manufacture

PRAXAIR TECHNOLOGY INC3 citations55

US7566384B2Jul 28, 2009

System and apparatus for real-time monitoring and control of sputter target erosion

PRAXAIR TECHNOLOGY INC1 citations45