Inventor
RECHTSTEINER GREGORY ALLEN
US7 patents
Patents
7 patentsUS9989866B2Jun 5, 2018
Wafer-based light source parameter control
Cymer LLC18 citations91
US9715180B2Jul 25, 2017
Wafer-based light source parameter control
Cymer LLC9 citations80
US12001144B2Jun 4, 2024
Forming multiple aerial images in a single lithography exposure pass
Cymer LLC0 citations60
US11526082B2Dec 13, 2022
Forming multiple aerial images in a single lithography exposure pass
Cymer LLC0 citations60
US10268123B2Apr 23, 2019
Wafer-based light source parameter control
Cymer LLC0 citations49
US10036960B2Jul 31, 2018
Wafer-based light source parameter control
Cymer LLC0 citations48
US9709897B2Jul 18, 2017
Polarization control of pulsed light beam
Cymer LLC1 citations48