Inventor
COLGAN IAN
IE11 patents
Patents
11 patentsUS9410742B2Aug 9, 2016
High capacity magnetic annealing system and method of operating
TOKYO ELECTRON LTD4 citations70
US10003018B1Jun 19, 2018
Vertical multi-batch magnetic annealing systems for reduced footprint manufacturing environments
TOKYO ELECTRON LTD4 citations68
US12211907B2Jan 28, 2025
Semiconductor manufacturing platform with in-situ electrical bias and methods thereof
TOKYO ELECTRON LTD0 citations61
US11894240B2Feb 6, 2024
Semiconductor processing systems with in-situ electrical bias
TOKYO ELECTRON LTD0 citations59
US10254046B2Apr 9, 2019
Magnetic annealing apparatus
TOKYO ELECTRON LTD1 citations59
US11837652B2Dec 5, 2023
Semiconductor processing system with in-situ electrical bias and methods thereof
TOKYO ELECTRON LTD0 citations58
US11335792B2May 17, 2022
Semiconductor processing system with in-situ electrical bias and methods thereof
TOKYO ELECTRON LTD0 citations58
US12235045B2Feb 25, 2025
Magnetic annealing equipment and method
TOKYO ELECTRON LTD0 citations57
US11521876B2Dec 6, 2022
Horizontal substrate boat
TOKYO ELECTRON LTD0 citations50
US11527345B2Dec 13, 2022
Workpiece magnetizing system and method of operating
TOKYO ELECTRON LTD0 citations47
US10473399B2Nov 12, 2019
Connection structure, magnetic annealing device using same, and connecting method
TOKYO ELECTRON LTD0 citations39