Inventor
BUREL MACIEJ
IE3 patents
Patents
3 patentsUS11894240B2Feb 6, 2024
Semiconductor processing systems with in-situ electrical bias
TOKYO ELECTRON LTD0 citations59
US11837652B2Dec 5, 2023
Semiconductor processing system with in-situ electrical bias and methods thereof
TOKYO ELECTRON LTD0 citations58
US11335792B2May 17, 2022
Semiconductor processing system with in-situ electrical bias and methods thereof
TOKYO ELECTRON LTD0 citations58