Inventor
TOSHIMA MIKI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TOSHIMA MIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
3 patentsUS10295409B2May 21, 2019
Substrate measurement system, method of measuring substrate, and computer program product
TOSHIBA MEMORY CORP1 citations60
US11031306B2Jun 8, 2021
Quality control method of position measurement light source, semiconductor manufacturing apparatus, and method for manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations58
US10599056B1Mar 24, 2020
Position measuring method, position measuring apparatus, and semiconductor device manufacturing method
TOSHIBA MEMORY CORP0 citations48