Inventor
PETRAGLIA JENNIFER
US4 patents
Patents
4 patentsUS9793096B2Oct 17, 2017
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP16 citations92
US10665429B2May 26, 2020
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP6 citations83
US9624578B2Apr 18, 2017
Method for RF compensation in plasma assisted atomic layer deposition
LAM RES CORP2 citations71
US11127567B2Sep 21, 2021
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP0 citations62