Inventor

JI BYOUNGHOON

KR2 patents

Patents

2 patents

US11476151B2Oct 18, 2022

Vacuum chuck, substrate processing apparatus including the same and related method of manufacture

SAMSUNG ELECTRONICS CO LTD4 citations66

US11220748B2Jan 11, 2022

Gas supply and layer deposition apparatus including the same

SAMSUNG ELECTRONICS CO LTD0 citations47