Inventor
KIM MINJOON
KR4 patents
⚠️ This page may combine multiple inventors who share the name “KIM MINJOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS11476151B2Oct 18, 2022
Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
SAMSUNG ELECTRONICS CO LTD4 citations66
US11220748B2Jan 11, 2022
Gas supply and layer deposition apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12014905B2Jun 18, 2024
Apparatus and method fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations45