Inventor
KLING MICHAEL E
US7 patents
⚠️ This page may combine multiple inventors who share the name “KLING MICHAEL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
5 patentsUS5900340AMay 4, 1999
One dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC269 citations98
US5849440ADec 15, 1998
Process for producing and inspecting a lithographic reticle and fabricating semiconductor devices using same
MOTOROLA INC94 citations97
US5920487AJul 6, 1999
Two dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC70 citations94
US5958635ASep 28, 1999
Lithographic proximity correction through subset feature modification
MOTOROLA INC62 citations93
US5827625AOct 27, 1998
Methods of designing a reticle and forming a semiconductor device therewith
MOTOROLA INC45 citations91