Inventor

HIKAZUTANI KEN-ICHI

JP2 patents

Patents

2 patents

US6468926B1Oct 22, 2002

Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride

FUJITSU LTD22 citations91

US6984267B2Jan 10, 2006

Manufacture system for semiconductor device with thin gate insulating film

FUJITSU LTD8 citations72