Inventor
HIGASHI MAKIO
JP6 patents
Patents
6 patentsUS7379785B2May 27, 2008
Substrate processing system, coating/developing apparatus, and substrate processing apparatus
TOKYO ELECTRON LTD492 citations98
US7210864B2May 1, 2007
Coating and developing apparatus
TOKYO ELECTRON LTD13 citations83
US7191033B2Mar 13, 2007
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD12 citations83
US7383093B2Jun 3, 2008
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD8 citations72
US6981808B2Jan 3, 2006
Substrate processing apparatus and substrate transferring method
TOKYO ELECTRON LTD8 citations72
US7840299B2Nov 23, 2010
Substrate collection method and substrate treatment apparatus
TOKYO ELECTRON LTD2 citations62