Inventor
EUM KISANG
KR5 patents
Patents
5 patentsUS10529594B2Jan 7, 2020
Apparatus and method for treating substrate
SEMES CO LTD2 citations66
US10930538B2Feb 23, 2021
Substrate alignment apparatus, substrate processing apparatus, and substrate processing method
SEMES CO LTD0 citations47
US10153137B2Dec 11, 2018
Support unit, substrate treating apparatus including the same, and method for treating a substrate
SEMES CO LTD0 citations47
US12055866B2Aug 6, 2024
Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus
SEMES CO LTD0 citations45
US12498174B2Dec 16, 2025
Substrate processing apparatus
SEMES CO LTD0 citations43