Inventor
OH CHANG SUK
KR6 patents
⚠️ This page may combine multiple inventors who share the name “OH CHANG SUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OH CHANG-SUK
3 patentsUS8113142B2Feb 14, 2012
Apparatus for processing a substrate
OH CHANG-SUK11 citations78
US8113141B2Feb 14, 2012
Apparatus for processing a substrate
OH CHANG-SUK13 citations78
US8115142B2Feb 14, 2012
Plate, apparatus for adjusting temperature of substrate having the plate and apparatus for processing substrate having the plate
OH CHANG-SUK0 citations48
SEMES CO LTD
3 patentsUS11845090B2Dec 19, 2023
Nozzle apparatus, apparatus and method for treating substrate
SEMES CO LTD0 citations53
US12124169B2Oct 22, 2024
Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same
SEMES CO LTD0 citations47
US12055866B2Aug 6, 2024
Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus
SEMES CO LTD0 citations45