Inventor

HIROSE TOMOHITO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HIROSE TOMOHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

2 patents

US8753786B2Jun 17, 2014

Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank

SHINETSU CHEMICAL CO0 citations50

US8753787B2Jun 17, 2014

Light pattern exposure method, photomask, and photomask blank

SHINETSU CHEMICAL CO0 citations40

YOSHIKAWA HIROKI

1 patent

US8475978B2Jul 2, 2013

Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film

YOSHIKAWA HIROKI2 citations59