Inventor

CHANG JUYEON

KR7 patents

⚠️ This page may combine multiple inventors who share the name “CHANG JUYEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

4 patents

US10920107B2Feb 16, 2021

Self-stopping polishing composition and method for bulk oxide planarization

CABOT MICROELECTRONICS CORP2 citations69

US10619076B2Apr 14, 2020

Self-stopping polishing composition and method for bulk oxide planarization

CABOT MICROELECTRONICS CORP2 citations69

US9597768B1Mar 21, 2017

Selective nitride slurries with improved stability and improved polishing characteristics

CABOT MICROELECTRONICS CORP3 citations68

US10619075B2Apr 14, 2020

Self-stopping polishing composition and method for bulk oxide planarization

CABOT MICROELECTRONICS CORP1 citations59

CMC MAT INC

2 patents

US12269969B2Apr 8, 2025

Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide

CMC MAT INC0 citations58

US12116502B2Oct 15, 2024

Self-stopping polishing composition and method for high topological selectivity

CMC MAT INC0 citations53

UNIV SUNGKYUNKWAN FOUND

1 patent

US7955586B2Jun 7, 2011

Synthesis of I-III-V12 nanoparticles and fabrication of polycrystalline absorber layers

UNIV SUNGKYUNKWAN FOUND10 citations76