Inventor
YEN CHUN-HSIANG
TW3 patents
Patents
3 patentsUS12498333B2Dec 16, 2025
Defect offset correction for examination of semiconductor specimens
APPLIED MATERIALS ISRAEL LTD0 citations41
US10288409B2May 14, 2019
Temperature sensitive location error compensation
APPLIED MATERIALS ISRAEL LTD0 citations33
US10074512B2Sep 11, 2018
System and method for setting a temperature of an object within a chamber
APPLIED MATERIALS ISRAEL LTD0 citations31