Inventor
SU ZONGHUI
US3 patents
Patents
3 patentsUS10276364B2Apr 30, 2019
Bevel etch profile control
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US10629427B2Apr 21, 2020
Bevel etch profile control
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US10599043B2Mar 24, 2020
Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components
APPLIED MATERIALS INC0 citations50