Inventor
CHEN JIAN JANSON
US5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JIAN JANSON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS11508563B1Nov 22, 2022
Methods and apparatus for processing a substrate using improved shield configurations
APPLIED MATERIALS INC2 citations69
US11621152B2Apr 4, 2023
Methods and apparatus for processing a substrate using improved shield configurations
APPLIED MATERIALS INC0 citations59
US12249484B2Mar 11, 2025
Methods and apparatus for controlling radio frequency electrode impedances in process chambers
APPLIED MATERIALS INC0 citations50
US11450511B2Sep 20, 2022
Methods and apparatus for zone control of RF bias for stress uniformity
APPLIED MATERIALS INC0 citations50