Inventor

KU SHU-YUAN

TW88 patents

⚠️ This page may combine multiple inventors who share the name “KU SHU-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KU SHU-YUAN

TAIWAN SEMICONDUCTOR MFG CO LTD

Metal gate structure cutting process

Cut metal gate with slanted sidewalls

Dielectric spacer to prevent contacting shorting

Isolation structure having different distances to adjacent FinFET devices

Metal gate structure and methods of fabricating thereof

Semiconductor device and method

Semiconductor structure cutting process and structures formed thereby

Semiconductor devices and methods of manufacturing thereof

Semiconductor device structure with metal gate stacks

Semiconductor devices and methods of manufacturing thereof

Residue-free metal gate cutting for fin-like field effect transistor

Cut metal gate processes

Transistor gates and methods of forming thereof

Dielectric spacer to prevent contacting shorting

Semiconductor device and method

Semiconductor device with cut metal gate and method of manufacture

Dummy gate cutting process and resulting gate structures

Gate dielectric preserving gate cut process

Metal gate structure cutting process

Cutting metal gates in fin field effect transistors

Semiconductor structure cutting process and structures formed thereby

Method of manufacturing a semiconductor device

Semiconductor device and method

Cut metal gate processes

Gate dielectric preserving gate cut process

Structure and formation method of semiconductor device with metal gate stacks

Residue-free metal gate cutting for fin-like field effect transistor

Cutting metal gates in fin field effect transistors

Multi-layer dielectric refill for profile control in semiconductor devices

Multi-layer dielectric refill for profile control in semiconductor devices

Semiconductor device and method

Semiconductor devices and methods of manufacturing thereof

Semiconductor devices and methods of manufacturing thereof

Semiconductor devices and methods of manufacturing thereof

Metal gate structure cutting process

Isolation structure having different distances to adjacent FinFET devices

Isolation structure having different distances to adjacent FinFET devices

Cut metal gate processes

Method of manufacturing a semiconductor device including depositing and etching a liner multiple times

Transistor gates and methods of forming thereof

Multi-layer dielectric refill for profile control in semiconductor devices

Semiconductor devices and methods of manufacturing thereof

Residue-free metal gate cutting for fin-like field effect transistor

Fin field-effect transistor and method of forming the same

Package component

Method for fabricating semiconductor structure with cutting depth control

Semiconductor structure cutting process and structures formed thereby

Dummy gate cutting process and resulting gate structures

YEH MATT

Method for removing dummy poly in a gate last process

KAO TA-WEI

Method for forming highly strained source/drain trenches