Inventor
JDIRA LUCIAN
NL11 patents
Patents
11 patentsUS10103040B1Oct 16, 2018
Apparatus and method for manufacturing a semiconductor device
ASM IP HOLDING BV466 citations96
US10844484B2Nov 24, 2020
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
ASM IP HOLDING BV10 citations83
US10343907B2Jul 9, 2019
Method and system for delivering hydrogen peroxide to a semiconductor processing chamber
ASM IP HOLDING BV3 citations72
US11230766B2Jan 25, 2022
Substrate processing apparatus and method
ASM IP HOLDING BV3 citations70
US12077854B2Sep 3, 2024
Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas
ASM IP HOLDING BV1 citations62
US12366410B2Jul 22, 2025
Apparatus for processing a plurality of substrates provided with an extractor chamber
ASM IP HOLDING BV0 citations51
US12243757B2Mar 4, 2025
Flange and apparatus for processing substrates
ASM IP HOLDING BV0 citations51
US11971217B2Apr 30, 2024
Batch furnace assembly and method of operating a batch furnace assembly
ASM IP HOLDING BV0 citations51
US9431238B2Aug 30, 2016
Reactive curing process for semiconductor substrates
ASM IP HOLDING BV1 citations51
US12412759B2Sep 9, 2025
Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus
ASM IP HOLDING BV0 citations44
US11830730B2Nov 28, 2023
Layer forming method and apparatus
ASM IP HOLDING BV0 citations44