Inventor
GRIMARD DENNIS
US6 patents
⚠️ This page may combine multiple inventors who share the name “GRIMARD DENNIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6074512AJun 13, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC236 citations98
US6454898B1Sep 24, 2002
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC43 citations95
US5636098AJun 3, 1997
Barrier seal for electrostatic chuck
APPLIED MATERIALS INC85 citations94
US7431857B2Oct 7, 2008
Plasma generation and control using a dual frequency RF source
APPLIED MATERIALS INC26 citations90