Inventor
WU FENG-INN
TW14 patents
⚠️ This page may combine multiple inventors who share the name “WU FENG-INN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS9481069B2Nov 1, 2016
Chemical mechanical polishing apparatus and polishing method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations81
US11984324B2May 14, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12128522B2Oct 29, 2024
Polishing head, chemical-mechanical polishing system and method for polishing substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11407083B2Aug 9, 2022
Polishing head, chemical-mechanical polishing system and method for polishing substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12451363B2Oct 21, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US9908213B2Mar 6, 2018
Method of CMP pad conditioning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US10328549B2Jun 25, 2019
Polishing head, chemical-mechanical polishing system and method for polishing substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9768080B2Sep 19, 2017
Semiconductor manufacturing apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations45
US12255150B2Mar 18, 2025
CMP safe alignment mark
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39