Inventor
CHA MYUNG SEOK
KR4 patents
Patents
4 patentsUS12300517B2May 13, 2025
Apparatus for treating substrate and temperature control method
SEMES CO LTD0 citations59
US12278119B2Apr 15, 2025
Apparatus for treating substrate
SEMES CO LTD0 citations48
US12094705B2Sep 17, 2024
Substrate treating method and substrate treating apparatus
SEMES CO LTD0 citations47
US12480595B2Nov 25, 2025
Anti freeze valve apparatus and semiconductor processing device including the same and manufacturing method thereof
SEMES CO LTD0 citations45