Inventor
TATSUKI KOICHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “TATSUKI KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
14 patentsUS6780692B2Aug 24, 2004
Laser annealing apparatus and method of fabricating thin film transistor
SONY CORP30 citations92
US6240111B1May 29, 2001
Laser beam generating apparatus and method
SONY CORP18 citations92
US5862163AJan 19, 1999
Apparatus for generating ultraviolet laser radiation
SONY CORP19 citations92
US6673639B2Jan 6, 2004
Method and system for evaluating polysilicon, and method and system for fabricating thin film transistor
SONY CORP13 citations84
US7109435B2Sep 19, 2006
Beam irradiator and laser anneal device
SONY CORP18 citations83
US6146251ANov 14, 2000
Polishing method, method of manufacturing an optical device, and a liquid suspension used for polishing
SONY CORP9 citations73
US5322588AJun 21, 1994
Method for producing KTIOPO4 single crystal
SONY CORP8 citations73
US7154673B2Dec 26, 2006
Light irradiator
SONY CORP8 citations72
US6933185B2Aug 23, 2005
Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor
SONY CORP11 citations72
US5370076ADec 6, 1994
Method of producing single crystal of KTiOPO4
SONY CORP11 citations72
US6798498B2Sep 28, 2004
Apparatus for evaluating polysilicon film
SONY CORP8 citations69
US6494584B1Dec 17, 2002
Ultraviolet optical device having an optical part with a gas sprayed thereon
SONY CORP6 citations63
US6248167B1Jun 19, 2001
Method for single crystal growth and growth apparatus
SONY CORP2 citations62
US7820531B2Oct 26, 2010
Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus
SONY CORP6 citations61
UMEZU NOBUHIKO
2 patentsUS8168518B2May 1, 2012
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device
UMEZU NOBUHIKO3 citations60
US8518756B2Aug 27, 2013
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device
UMEZU NOBUHIKO0 citations49