Inventor
IWATA TOMOMI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “IWATA TOMOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
6 patentsUS10777404B2Sep 15, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations70
US10720320B2Jul 21, 2020
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD2 citations70
US11031235B2Jun 8, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US10910213B2Feb 2, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations60
US10843223B2Nov 24, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations58
US10224198B2Mar 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
DAINIPPON SCREEN MFG
5 patentsUS6841031B2Jan 11, 2005
Substrate processing apparatus equipping with high-pressure processing unit
DAINIPPON SCREEN MFG44 citations92
US6691430B2Feb 17, 2004
High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus
DAINIPPON SCREEN MFG39 citations92
US7384484B2Jun 10, 2008
Substrate processing method, substrate processing apparatus and substrate processing system
DAINIPPON SCREEN MFG18 citations82
US7562663B2Jul 21, 2009
High-pressure processing apparatus and high-pressure processing method
DAINIPPON SCREEN MFG3 citations62
US7435396B2Oct 14, 2008
High-pressure processing apparatus and high-pressure processing method
DAINIPPON SCREEN MFG4 citations62