Inventor

YU WEI-KUAN

TW3 patents

⚠️ This page may combine multiple inventors who share the name “YU WEI-KUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG CHIA-CHENG

1 patent

US8589830B2Nov 19, 2013

Method and apparatus for enhanced optical proximity correction

CHANG CHIA-CHENG29 citations88

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9026956B1May 5, 2015

Method of lithographic process evaluation

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71

TAIWAN SEMICONDUCTOR MFG

1 patent

US9213233B2Dec 15, 2015

Photolithography scattering bar structure and method

TAIWAN SEMICONDUCTOR MFG3 citations58