Inventor
BENCHER CHRISTOPHER
US11 patents
Patents
11 patentsUS6635583B2Oct 21, 2003
Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating
APPLIED MATERIALS INC72 citations95
US6365518B1Apr 2, 2002
Method of processing a substrate in a processing chamber
APPLIED MATERIALS INC95 citations95
US9798240B2Oct 24, 2017
Controlling photo acid diffusion in lithography processes
APPLIED MATERIALS INC7 citations84
US9377692B2Jun 28, 2016
Electric/magnetic field guided acid diffusion
APPLIED MATERIALS INC18 citations83
US6951826B2Oct 4, 2005
Silicon carbide deposition for use as a low dielectric constant anti-reflective coating
APPLIED MATERIALS INC14 citations83
US12372779B2Jul 29, 2025
Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems
APPLIED MATERIALS INC0 citations62
US11899198B2Feb 13, 2024
Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems
APPLIED MATERIALS INC1 citations62
US10108093B2Oct 23, 2018
Controlling photo acid diffusion in lithography processes
APPLIED MATERIALS INC0 citations52
US11822253B2Nov 21, 2023
Decreasing distortion by modifying pixel spacing
APPLIED MATERIALS INC0 citations51
US10877199B2Dec 29, 2020
Method for manufacturing a polarizer apparatus, polarizer apparatus, and display system having a polarizer apparatus
APPLIED MATERIALS INC0 citations41
US9395631B2Jul 19, 2016
Multi-beam pattern generators employing yaw correction when writing upon large substrates, and associated methods
APPLIED MATERIALS INC0 citations40