Inventor

BIELING STIG

DE21 patents

⚠️ This page may combine multiple inventors who share the name “BIELING STIG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BIELING STIG

ZEISS CARL SMT GMBH

Pupil facet mirror, optical system and illumination optics for a projection lithography system

Illumination optical unit for EUV projection lithography

Illumination optical unit for EUV projection lithography

Illumination system of a microlithographic projection exposure apparatus

Mirror array

Illumination optical device for projection lithography

Facet mirror

Illumination system of a microlithographic projection exposure apparatus

Illumination optical system for EUV projection lithography

Illumination optical element for projection lithography

Assembly for a projection exposure apparatus for EUV projection lithography

Projection exposure apparatus and method for measuring an imaging aberration

Reflecting coating with optimized thickness

Microlithographic illumination unit

Illumination optical assembly for a projection exposure apparatus

Method and apparatus for setting an illumination optical unit

Method for illuminating an object field of a projection exposure system

PATRA MICHAEL

Illumination system of a microlithographic projection exposure apparatus

WANGLER JOHANNES

Illumination optical unit for projection lithography

ASML NETHERLANDS BV

Radiation collector, radiation source and lithographic apparatus

ENDRES MARTIN

Illumination optical unit for EUV microlithography