Inventor
YAMASAKI GAKU
JP6 patents
Patents
6 patentsUS11434580B2Sep 6, 2022
Plating apparatus
EBARA CORP0 citations60
US11332838B2May 17, 2022
Plating apparatus
EBARA CORP0 citations48
US11598017B2Mar 7, 2023
Method of plating
EBARA CORP0 citations44
US11332843B2May 17, 2022
Anode assembly
EBARA CORP0 citations44
US10937675B2Mar 2, 2021
Substrate processing apparatus, substrate processing apparatus control method, and storage medium storing program
EBARA CORP0 citations44
US10557211B2Feb 11, 2020
Substrate transporting apparatus, control apparatus for substrate transporting apparatus, displacement compensation method for substrate transporting apparatus, program for implementing method and recording medium that records program
EBARA CORP0 citations38