Inventor
PETTIBONE DONALD
US9 patents
⚠️ This page may combine multiple inventors who share the name “PETTIBONE DONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US9995850B2Jun 12, 2018
System, method and apparatus for polarization control
KLA TENCOR CORP8 citations82
US10921488B2Feb 16, 2021
System, method and apparatus for polarization control
KLA TENCOR CORP1 citations71
US10739276B2Aug 11, 2020
Minimizing filed size to reduce unwanted stray light
KLA TENCOR CORP4 citations71
US9747670B2Aug 29, 2017
Method and system for improving wafer surface inspection sensitivity
KLA TENCOR CORP2 citations70
US9970873B1May 15, 2018
System and method for luminescent tag based wafer inspection
KLA TENCOR CORP2 citations69
US9726615B2Aug 8, 2017
System and method for simultaneous dark field and phase contrast inspection
KLA TENCOR CORP2 citations66