Inventor
CIMINO MAURO
US4 patents
Patents
4 patentsUS11533783B2Dec 20, 2022
Multi-zone heater model-based control in semiconductor manufacturing
APPLIED MATERIALS INC3 citations63
US11599069B1Mar 7, 2023
Method for auto-tuning and process performance assessment of chamber control
APPLIED MATERIALS INC0 citations59
US11791172B2Oct 17, 2023
Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems
APPLIED MATERIALS INC0 citations48
US12438012B2Oct 7, 2025
Automatic control of substrates
APPLIED MATERIALS INC0 citations43