Inventor
ROHRMANN HARTMUT
DE6 patents
⚠️ This page may combine multiple inventors who share the name “ROHRMANN HARTMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EVATEC AG
4 patentsUS11551950B2Jan 10, 2023
Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece
EVATEC AG2 citations67
US11848179B2Dec 19, 2023
Methods of and apparatus for magnetron sputtering
EVATEC AG0 citations52
US11476099B2Oct 18, 2022
Methods of and apparatus for magnetron sputtering
EVATEC AG0 citations52
US11952654B2Apr 9, 2024
Liquid sputter target
EVATEC AG0 citations40