Inventor
BANIK STEPHEN J
US7 patents
Patents
7 patentsUS12331421B2Jun 17, 2025
Edge removal for through-resist plating in an electro-plating cup assembly
LAM RES CORP0 citations60
US11655556B2May 23, 2023
Flow assisted dynamic seal for high-convection, continuous-rotation plating
LAM RES CORP0 citations60
US11746435B2Sep 5, 2023
Removing bubbles from plating cells
LAM RES CORP0 citations57
US11214887B2Jan 4, 2022
Removing bubbles from plating cell
LAM RES CORP0 citations57
US10612151B2Apr 7, 2020
Flow assisted dynamic seal for high-convection, continuous-rotation plating
LAM RES CORP0 citations50
US11450631B2Sep 20, 2022
Alternative integration for redistribution layer process
LAM RES CORP0 citations48
US10655240B2May 19, 2020
Removing bubbles from plating cells
LAM RES CORP0 citations46