Inventor
SUGANO YUKIYASU
JP11 patents
Patents
11 patentsUS6693258B2Feb 17, 2004
Process for producing thin film semiconductor device and laser irradiation apparatus
SONY CORP95 citations97
US5397744AMar 14, 1995
Aluminum metallization method
SONY CORP56 citations96
US6646711B2Nov 11, 2003
Method for manufacturing display panel having reduced wall thickness and display panel having reduced wall thickness
SONY CORP54 citations95
US6632711B2Oct 14, 2003
Process for producing thin film semiconductor device and laser irradiation apparatus
SONY CORP60 citations95
US5290731AMar 1, 1994
Aluminum metallization method
SONY CORP73 citations95
US5972786AOct 26, 1999
Contact hole structure in a semiconductor and formation method therefor
SONY CORP21 citations92
US5776830AJul 7, 1998
Process for fabricating connection structures
SONY CORP22 citations92
US5393398AFeb 28, 1995
Magnetron sputtering apparatus
SONY CORP25 citations92
US5795825AAug 18, 1998
Connection layer forming method
SONY CORP7 citations73
US5283206AFeb 1, 1994
Method of removing germanium particles precipitated in an aluminum/germanium alloy film
SONY CORP18 citations73
US6933185B2Aug 23, 2005
Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor
SONY CORP11 citations72