Inventor
TSUNEDA MASAYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TSUNEDA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
6 patentsUS6682971B2Jan 27, 2004
Method of manufacturing a semiconductor
HITACHI INT ELECTRIC INC467 citations98
US6764916B1Jul 20, 2004
Manufacturing method for semiconductor device
HITACHI INT ELECTRIC INC14 citations82
US6825126B2Nov 30, 2004
Manufacturing method of semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC11 citations71
US6576481B2Jun 10, 2003
Method of manufacturing semiconductor devices
HITACHI INT ELECTRIC INC6 citations62
US6548404B2Apr 15, 2003
Method and apparatus for manufacturing semiconductor devices
HITACHI INT ELECTRIC INC0 citations51
US6204199B1Mar 20, 2001
Method for producing a semiconductor device
HITACHI INT ELECTRIC INC1 citations47