Inventor
KRASEMANN ANKE
DE6 patents
Patents
6 patentsUS6528384B2Mar 4, 2003
Method for manufacturing a trench capacitor
INFINEON TECHNOLOGIES AG20 citations89
US6841443B2Jan 11, 2005
Method for fabricating a deep trench capacitor for dynamic memory cells
INFINEON TECHNOLOGIES AG13 citations82
US6777303B2Aug 17, 2004
Method for fabricating an insulation collar in a trench capacitor
INFINEON TECHNOLOGIES AG11 citations70
US6984556B2Jan 10, 2006
Method of forming an isolation layer and method of manufacturing a trench capacitor
INFINEON TECHNOLOGIES AG3 citations57
US6730607B2May 4, 2004
Method for fabricating a barrier layer
INFINEON TECHNOLOGIES AG0 citations48
US7390713B2Jun 24, 2008
Method for forming trench memory cell structures for DRAMS
INFINEON TECHNOLOGIES AG0 citations38